C. Vérove - Concepedia

Author

C. Vérove

Also Known As

C Verove, C. Verove, C. Vérove, Christophe Vérove, Verove, C., Vérove, C., Vérove, Christophe

Publications

175

Citations

H-Index

Concepts

All Affiliations

C. Vérove is an author at STMicroelectronics (France) specializing in engineering, electrical engineering, and applied physics.

#	Concept	H-Index	Publications	Citations
1	Engineering	5	5	125
2	Applied Physics	4	4	110
3	Natural Sciences	1	1	49
4	Chemical Engineering	1	1	18
5	Chemistry	1	1	18

C. Vérove

Publications

125

Citations

H-Index

Page 1

	Year	Citations
Unbiased line width roughness measurements with critical dimension scanning electron microscopy and critical dimension atomic force microscopy L. Azarnouche, E. Pargon, K. Menguelti, Journal of Applied Physics EngineeringMeasurementMicroscopyCritical DimensionElectron Microscopy	2012	49
Integration of fluorine-doped silicon oxide in copper pilot line for 0.12-μm technology J.-P. Reynard, C. Vérove, E. Sabouret, Microelectronic Engineering Materials Engineering0.12-μM TechnologyElectrical EngineeringEngineeringOxide Electronics	2002	28
Residue growth on metallic-hard mask after dielectric etching in fluorocarbon-based plasmas. I. Mechanisms N. Possémé, T. Chevolleau, R. Bouyssou, Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena Materials ScienceChemical EngineeringFluorocarbon EtchingEngineeringCorrosion	2010	18
Demonstration of an extendable and industrial 300mm BEOL integration for the 65-mn technology node O. Hinsinger, Robert Fox, E. Sabouret, 65-Mn Technology NodeElectrical EngineeringPhysical Design (Electronics)EngineeringVlsi Design	2005	15
Integration of a 3 level Cu-SiO/sub 2/ air gap interconnect for sub 0.1 micron CMOS technologies V. Arnal, J. Torrès, Philippe Gayet, EngineeringDevice IntegrationSilicon On InsulatorInterconnect (Integrated Circuits)Advanced Packaging (Semiconductors)	2001	15

Page 1