Concepedia

R. Bouyssou

RB

Statistics

Publications

8

Citations

153

H-Index

8

Active since

2004

Affiliations

Institut polytechnique de Grenoble(Current)

Commissariat à l'Énergie Atomique et aux Énergies Alternatives

Laboratoire d'Électronique des Technologies de l'Information

Centre National de la Recherche Scientifique

CEA Grenoble

R. Bouyssou is an author at Institut polytechnique de Grenoble specializing in materials engineering, materials science, and engineering.

Publications per year

2004–2019

8

Publications

8

Roughening of porous SiCOH materials in fluorocarbon plasmas

F. Bailly, T. Chevolleau, Maxime Darnon et al. · Journal of Applied Physics · 2010 · 29 citations · Full text

, , +17

Patterning of narrow porous SiOCH trenches using a TiN hard mask

Maxime Darnon, T. Chevolleau, David Eon et al. · Microelectronic Engineering · 2008 · 27 citations · Full text

, , +13

Residue growth on metallic-hard mask after dielectric etching in fluorocarbon-based plasmas. I. Mechanisms

N. Possémé, T. Chevolleau, R. Bouyssou et al. · Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena · 2010 · 19 citations

, , +17

Contour based metrology: getting more from a SEM image

Bertrand Le-Gratiet, R. Bouyssou, J. Ducoté et al. · 2019 · 17 citations

, , +16

Scatterometric porosimetry: A new characterization technique for porous material patterned structures

R. Bouyssou, Mohamed El Kodadi, Christophe Licitra et al. · Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena · 2010 · 16 citations

, , +17

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