J. Ducoté

Roughening of porous SiCOH materials in fluorocarbon plasmas

F. Bailly, T. Chevolleau, Maxime Darnon et al. · Journal of Applied Physics · 2010 · 29 citations · Full text

Materials Science, Materials Engineering, Ion Implantation +15

Modifications of dielectric films induced by plasma ashing processes: Hybrid versus porous SiOCH materials

Maxime Darnon, T. Chevolleau, N. Possémé et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2008 · 22 citations

Engineering, Nanoporous Material, Chemistry +17

Contour based metrology: getting more from a SEM image

Bertrand Le-Gratiet, R. Bouyssou, J. Ducoté et al. · 2019 · 17 citations

Engineering, Microscopy, Measurement +21

Patterning of porous SiOCH using an organic mask: Comparison with a metallic masking strategy

Maxime Darnon, T. Chevolleau, J. Ducoté et al. · Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena · 2010 · 15 citations

Engineering, Electron-beam Lithography, Porous Membrane +23

Prediction of porous dielectric line wiggling phenomenon with metallic hard mask: From simulation to experiment

J. Ducoté, N. Possémé, Maxime Darnon et al. · Applied Physics Letters · 2014 · 13 citations · Full text

Engineering, Narrow Trenches, Mechanical Engineering +17