Concepedia

E. Sabouret

ES

4

Publications

77

Citations

4

H-Index

2002

Active since

Affiliations

STMicroelectronics (France)(Current)

Philips (France)

Commissariat à l'Énergie Atomique et aux Énergies Alternatives

E. Sabouret is an author at STMicroelectronics (France) specializing in electrical engineering, microelectronics, and engineering.

Top concepts

EngineeringMicroelectronicsElectrical EngineeringVlsi DesignApplied PhysicsNanoelectronicsComputer EngineeringElectronic PackagingComputer ArchitectureMaterials Engineering

Publications per year

2002–2006

4

Publications

4

Integration of fluorine-doped silicon oxide in copper pilot line for 0.12-μm technology

J.-P. Reynard, C. Vérove, E. Sabouret et al. · Microelectronic Engineering · 2002 · 28 citations

Materials Engineering, 0.12-μM Technology, Electrical Engineering +10

Integration of a mechanically reliable 65-nm node technology for low-k and ULK interconnects with various substrate and package types

Cindy Goldberg, Susan Downey, Vincent Fiori et al. · 2005 · 17 citations

Engineering, Mechanical Engineering, Flip-chip Packages +19

High performance k=2.5 ULK backend solution using an improved TFHM architecture, extendible to the 45nm technology node

Robert Fox, O. Hinsinger, E. Richard et al. · 2006 · 17 citations

Low-power Electronics, Improved Tfhm Architecture, Electrical Engineering +13

Demonstration of an extendable and industrial 300mm BEOL integration for the 65-mn technology node

O. Hinsinger, Robert Fox, E. Sabouret et al. · 2005 · 15 citations

65-Mn Technology Node, Electrical Engineering, Physical Design (Electronics) +14

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