Integration of fluorine-doped silicon oxide in copper pilot line for 0.12-μm technology - Concepedia

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Integration of fluorine-doped silicon oxide in copper pilot line for 0.12-μm technology

28

Citations

2

References

2002

Year

J.-P. Reynard, C. Vérove, E. Sabouret, P. Motte, B. Descouts, C. Chaton, J. Michailos, K. Barla

Microelectronic Engineering

Materials Engineering0.12-μM TechnologyElectrical EngineeringEngineeringOxide ElectronicsInterconnect (Integrated Circuits)Applied PhysicsCopper Pilot LineSemiconductor Device FabricationIntegrated CircuitsSilicon On InsulatorMicroelectronicsFluorine-doped Silicon Oxide

References

	Year	Citations

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