Concepedia

P. Motte

PM

Statistics

Publications

5

Citations

108

H-Index

5

Active since

1999

Affiliations

CEA Grenoble(Current)

Commissariat à l'Énergie Atomique et aux Énergies Alternatives

STMicroelectronics (France)

STMicroelectronics (Switzerland)

Orange (France)

P. Motte is an author at CEA Grenoble specializing in materials science, materials engineering, and engineering.

Publications per year

1999–2002

5

Publications

5

TiN-CVD process optimization for integration with Cu-CVD

P. Motte, M. Proust, J. Torrès et al. · Microelectronic Engineering · 2000 · 32 citations

Engineering, Materials Engineering, Materials Science +12

Integration of fluorine-doped silicon oxide in copper pilot line for 0.12-μm technology

J.-P. Reynard, C. Vérove, E. Sabouret et al. · Microelectronic Engineering · 2002 · 28 citations

Engineering, Materials Engineering, Materials Science +9

Assessment of copper contamination impact on inter-level dielectric reliability performed with time-dependent-dielectric-breakdown tests

R. Gonella, P. Motte, J. Torrès · Microelectronics Reliability · 2000 · 19 citations

Natural Sciences, Electrical Engineering, Materials Science +14

Study of Cu contamination during copper integration for subquarter micron technology

P. Motte, J. Torrès, J. Palleau et al. · Solid-State Electronics · 1999 · 16 citations

Engineering, Materials Engineering, Materials Science +13

SILK compatibility with the IMD process using copper metallization

J.C Maisonobe, G. Passemard, C. Lacour et al. · Microelectronic Engineering · 2000 · 13 citations

Natural Sciences, Materials Engineering, Materials Science +12

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