M. Proust

Effects of cathode electrolyte interfacial (CEI) layer on long term cycling of all-solid-state thin-film batteries

Ziying Wang, Jungwoo Z. Lee, Huolin L. Xin et al. · Journal of Power Sources · 2016 · 109 citations · Full text

Natural Sciences, Materials Engineering, Materials Science +16

TiN-CVD process optimization for integration with Cu-CVD

P. Motte, M. Proust, J. Torrès et al. · Microelectronic Engineering · 2000 · 32 citations

Engineering, Materials Engineering, Materials Science +12

Characterization of electrical and crystallographic properties of metal layers at deca-nanometer scale using Kelvin probe force microscope

Nicolas Gaillard, D. Mariolle, F. Bertin et al. · Microelectronic Engineering · 2006 · 26 citations

Natural Sciences, Materials Engineering, Materials Science +17

Nanoscale Chemical Characterization of Solid-State Microbattery Stacks by Means of Auger Spectroscopy and Ion-Milling Cross Section Preparation

Arnaud Uhart, Jean‐Bernard Ledeuil, Brigitte Pecquenard et al. · ACS Applied Materials & Interfaces · 2017 · 20 citations

Natural Sciences, Materials Engineering, Materials Science +17

Integration of a high density Ta2O5 MIM capacitor following 3D damascene architecture compatible with copper interconnects

M. Thomas, A. Farcy, Nicolas Gaillard et al. · Microelectronic Engineering · 2006 · 15 citations

Engineering, Materials Engineering, Materials Science +15