K. Menguelti

Statistics

Publications

Citations

398

H-Index

Active since

2009

Affiliations

Centre National de la Recherche Scientifique(Current)

Luxembourg Institute of Science and Technology

Commissariat à l'Énergie Atomique et aux Énergies Alternatives

STMicroelectronics (France)

CEA Grenoble

K. Menguelti is an author at Centre National de la Recherche Scientifique specializing in materials science, natural sciences, and materials engineering.

ORCID

Publications per year

2009–2024

Publications

Mechanisms involved in HBr and Ar cure plasma treatments applied to 193 nm photoresists

E. Pargon, K. Menguelti, M. Martin et al. · Journal of Applied Physics · 2009 · 73 citations

Natural Sciences, Materials Engineering, Materials Science +16

Unbiased line width roughness measurements with critical dimension scanning electron microscopy and critical dimension atomic force microscopy

L. Azarnouche, E. Pargon, K. Menguelti et al. · Journal of Applied Physics · 2012 · 50 citations

Engineering, Materials Engineering, Materials Science +17

Plasma impact on 193 nm photoresist linewidth roughness: Role of plasma vacuum ultraviolet light

E. Pargon, M. Martin, K. Menguelti et al. · Applied Physics Letters · 2009 · 42 citations

Natural Sciences, Materials Science, Physics +17

Controlling electrical and optical properties of zinc oxide thin films grown by thermal atomic layer deposition with oxygen gas

Tai Nguyen, Noureddine Adjeroud, Maël Guennou et al. · Results in Materials · 2020 · 34 citations · Full text

Natural Sciences, Materials Science, Physics +17

Benefits of plasma treatments on critical dimension control and line width roughness transfer during gate patterning

L. Azarnouche, E. Pargon, K. Menguelti et al. · Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena · 2012 · 33 citations

Natural Sciences, Electrical Engineering, Materials Science +17

1–5 of 15