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Leakage current suppression in spatially controlled Si-doped ZrO2 for capacitors using atomic layer deposition

Electrical EngineeringEngineeringNanoelectronicsSi-doped Zro2Oxide ElectronicsApplied PhysicsSemiconductor Device FabricationSilicon On InsulatorLeakage Current SuppressionAtomic Layer DepositionMicroelectronics