Steven M. George

Electrical characterization of thin Al2O3 films grown by atomic layer deposition on silicon and various metal substrates

Markus D. Groner, Jeffrey W. Elam, F. Fabreguette et al. · Thin Solid Films · 2002 · 724 citations

Natural Sciences, Materials Engineering, Materials Science +17

Surface Chemistry for Atomic Layer Growth

Steven M. George, A. W. Ott, J. W. Klaus · The Journal of Physical Chemistry · 1996 · 676 citations

Natural Sciences, Chemistry, Materials Science +17

Conformal Coating on Ultrahigh-Aspect-Ratio Nanopores of Anodic Alumina by Atomic Layer Deposition

Jeffrey W. Elam, Dmitri Routkevitch, Peter Mardilovich et al. · Chemistry of Materials · 2003 · 622 citations

Natural Sciences, Materials Engineering, Materials Science +17

Viscous flow reactor with quartz crystal microbalance for thin film growth by atomic layer deposition

Jeffrey W. Elam, Markus D. Groner, Steven M. George · Review of Scientific Instruments · 2002 · 561 citations

Natural Sciences, Materials Engineering, Materials Science +16

Hydrogen desorption kinetics from monohydride and dihydride species on silicon surfaces

Pawan Gupta, Vicki L. Colvin, Steven M. George · Physical review. B, Condensed matter · 1988 · 556 citations

Natural Sciences, Chemistry, Materials Science +17