Publication | Closed Access
Electrical characterization of thin Al2O3 films grown by atomic layer deposition on silicon and various metal substrates
717
Citations
33
References
2002
Year
Materials ScienceThin Al2o3 FilmsElectrical EngineeringEngineeringOxide ElectronicsSurface ScienceApplied PhysicsElectrical CharacterizationThin FilmsChemical DepositionMicroelectronicsChemical Vapor DepositionAtomic Layer DepositionThin Film Processing
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