Markus D. Groner

Electrical characterization of thin Al2O3 films grown by atomic layer deposition on silicon and various metal substrates

Markus D. Groner, Jeffrey W. Elam, F. Fabreguette et al. · Thin Solid Films · 2002 · 717 citations

Materials Science, Thin Al2o3 Films, Electrical Engineering +11

Viscous flow reactor with quartz crystal microbalance for thin film growth by atomic layer deposition

Jeffrey W. Elam, Markus D. Groner, Steven M. George · Review of Scientific Instruments · 2002 · 550 citations

Aluminium Nitride, Engineering, Al2o3 Ald +16

Ultrathin Direct Atomic Layer Deposition on Composite Electrodes for Highly Durable and Safe Li‐Ion Batteries

Yoon Seok Jung, Andrew S. Cavanagh, Leah Riley et al. · Advanced Materials · 2010 · 547 citations

Engineering, Electrode-electrolyte Interface, Direct Ald +20

Ca test of Al2O3 gas diffusion barriers grown by atomic layer deposition on polymers

P. F. Carcia, R. Scott McLean, Michael H. Reilly et al. · Applied Physics Letters · 2006 · 425 citations

Aluminium Nitride, Optical Materials, Engineering +20

Gas diffusion barriers on polymers using Al2O3 atomic layer deposition

Markus D. Groner, Steven M. George, R. Scott McLean et al. · Applied Physics Letters · 2006 · 384 citations

Gas Diffusion Barriers, Engineering, Organic Electronics +16