Current Understanding and Modeling of B Diffusion and Activation Anomalies in Preamorphized Ultra-Shallow Junctions - Concepedia

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Current Understanding and Modeling of B Diffusion and Activation Anomalies in Preamorphized Ultra-Shallow Junctions

41

Citations

23

References

2004

Year

B. Colombeau, Andrew J. Smith, N. E. B. Cowern, Bartek Pawlak, F. Cristiano, Ray Duffy, A. Claverie, C.J. Ortiz, P. Pichler, E. Lampin,

MRS Proceedings

B DiffusionEngineeringTunneling MicroscopyPhysicsApplied PhysicsCondensed Matter PhysicsActivation AnomaliesCurrent UnderstandingCharge Carrier TransportMicroelectronicsCharge TransportSemiconductor Device

References

	Year	Citations

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