Characterization of interface defects related to negative-bias temperature instability in ultrathin plasma-nitrided SiON/Si〈100〉 systems

Shinji Fujieda, Yoshinao Miura, Motofumi Saitoh, Yuden Teraoka, Akitaka Yoshigoe

Microelectronics Reliability · 2004 · 15 citations · 30 references

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