Concepedia

Silicon Nitride

Silicon Nitride is a ceramic thin-film material used in microelectromechanical systems and microfabrication processes, distinguished by its high mechanical strength, thermal stability, and resistance to oxidation and chemical etching, making it suitable for structural and passivation layers in semiconductor devices.

9.1K

Publications

384.1K

Citations

27.6K

Authors

3.5K

Institutions

Publications per year

2017–2026

1.6K

Variants

Si3n4

Parents

Publications

9.1K

New CMOS-compatible platforms based on silicon nitride and Hydex for nonlinear optics

David Moss, Roberto Morandotti, Alexander L. Gaeta et al. · Nature Photonics · 2013 · 1.8K citations · Full text

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Silicon Nitride and Related Materials

Frank L. Riley · Journal of the American Ceramic Society · 2000 · 1.5K citations

, , +14

Electromigration in thin aluminum films on titanium nitride

I. A. Blech · Journal of Applied Physics · 1976 · 1.2K citations

, , +17

Isothermal Elastohydrodynamic Lubrication of Point Contacts: Part III—Fully Flooded Results

B. J. Hamrock, D. Dowson · Journal of Lubrication Technology · 1977 · 1.2K citations

, , +16

Etch rates for micromachining processing-part II

K.R. Williams, Kapil Gupta, Matthew Wasilik · Journal of Microelectromechanical Systems · 2003 · 1K citations

, , +17

1–5 of 9.1K

Authors

27.6K

  1. KH
    Kiyoshi Hirao

    National Institute of Advanced Industrial Science and Technology, Japan

    63 publications · 4.1K citations

    32

    h-index

  2. MM
    Mamoru Mitomo

    National Institute for Materials Science, Japan

    44 publications · 2.3K citations

    27

    h-index

  3. TO
    Tatsuki Ohji

    National Institute of Advanced Industrial Science and Technology, Japan

    45 publications · 2.1K citations

    26

    h-index

  4. JK
    Jerzy Kanicki

    University of Michigan, United States

    38 publications · 2.5K citations

    26

    h-index

  5. GP
    Giuseppe Pezzotti

    Kyoto Institute of Technology, Japan

    44 publications · 1.9K citations

    25

    h-index

1–5 of 27.6K

Institutions

3.5K

  1. American Ceramic Society

    Westerville, United States

    81 h-index

    900 publications

    60.4K citations

  2. Centre National de la Recherche Scientifique

    Paris, France

    48 h-index

    1.1K publications

    34.5K citations

  3. University of California, Berkeley

    Berkeley, United States

    47 h-index

    288 publications

    23.8K citations

  4. National Institute of Standards and Technology

    Gaithersburg, United States

    46 h-index

    307 publications

    15.3K citations

  5. Massachusetts Institute of Technology

    Cambridge, United States

    44 h-index

    379 publications

    23.8K citations

  6. National Institute for Materials Science

    Tsukuba, Japan

    42 h-index

    234 publications

    12.5K citations

  7. Max Planck Society

    Munich, Germany

    41 h-index

    212 publications

    15.7K citations

  8. IBM Research - Thomas J. Watson Research Center

    Yorktown Heights, United States

    41 h-index

    162 publications

    8.9K citations

1–8 of 3.5K

Venues

  1. Journal of the American Ceramic Society

    553 publications · 31.8K citations

    88

    h-index

  2. Applied Physics Letters

    585 publications · 30.7K citations

    84

    h-index

  3. Journal of Applied Physics

    411 publications · 20.6K citations

    71

    h-index

  4. Journal of The Electrochemical Society

    JES · 252 publications · 11.6K citations

    57

    h-index

  5. Optics Express

    176 publications · 9.5K citations

    54

    h-index

1–5