Concepedia

Bruce E. Deal

BE

14

Publications

2.2K

Citations

13

H-Index

1953

Active since

Affiliations

Fairchild Semiconductor (United States)(Current)

United States Department of the Army

Bruce E. Deal is an author at Fairchild Semiconductor (United States) specializing in engineering, applied physics, and materials science.

Top concepts

EngineeringApplied PhysicsMaterial ScienceChemical EngineeringElectrical EngineeringSemiconductorsMicroelectronicsElectronic PackagingChemistrySurface Science

Publications per year

1953–1982

14

Publications

14

Interface states and electron spin resonance centers in thermally oxidized (111) and (100) silicon wafers

Edward H. Poindexter, P. J. Caplan, Bruce E. Deal et al. · Journal of Applied Physics · 1981 · 555 citations

Engineering, Integrated Circuits, Silicon On Insulator +17

ESR centers, interface states, and oxide fixed charge in thermally oxidized silicon wafers

P. J. Caplan, Edward H. Poindexter, Bruce E. Deal et al. · Journal of Applied Physics · 1979 · 462 citations

Engineering, Silicon On Insulator, Semiconductor Device +18

The Current Understanding of Charges in the Thermally Oxidized Silicon Structure

Bruce E. Deal · Journal of The Electrochemical Society · 1974 · 360 citations · Full text

Materials Engineering, Electrical Engineering, Engineering +14

Dependence of Interface State Density on Silicon Thermal Oxidation Process Variables

R. R. Razouk, Bruce E. Deal · Journal of The Electrochemical Society · 1979 · 238 citations

Engineering, Oxidation Resistance, Thermal Oxidation +16

The Oxidation of Silicon in Dry Oxygen, Wet Oxygen, and Steam

Bruce E. Deal · Journal of The Electrochemical Society · 1963 · 120 citations

Materials Science, Chemical Engineering, Engineering +13

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