Motofumi Saitoh

Interface defects responsible for negative-bias temperature instability in plasma-nitrided SiON/Si(100) systems

Shinji Fujieda, Yoshinao Miura, Motofumi Saitoh et al. · Applied Physics Letters · 2003 · 72 citations

D2 Annealing, Engineering, Silicon On Insulator +16

Microscopic characterization of the C–F bonds in fluorine–graphite intercalation compounds

Kaname Yoshida, Yoshihiro Sugawara, Motofumi Saitoh et al. · Journal of Power Sources · 2019 · 42 citations

Materials Science, Fluorine–graphite Intercalation Compounds, Engineering +6

High-quality HfSixOy gate dielectrics fabricated by solid phase interface reaction between physical-vapor-deposited metal–Hf and SiO2 underlayer

Heiji Watanabe, Motofumi Saitoh, Nobuyuki Ikarashi et al. · Applied Physics Letters · 2004 · 37 citations

Materials Science, Gate Dielectrics, Electrical Engineering +15

High-reliability, high-performance RF micromachined switch using liquid metal

Y. Kondoh, T. Takenaka, Tomohiro Hidaka et al. · Journal of Microelectromechanical Systems · 2005 · 33 citations

Mechanical Relays, Electrical Engineering, Engineering +11

First-principles calculation of oxygen K-electron energy loss near edge structure of HfO₂

Teruyasu Mizoguchi, Motofumi Saitoh, Yuichi Ikuhara · Journal of Physics Condensed Matter · 2009 · 28 citations

Engineering, First-principles Calculation, Electron Diffraction +18