Square-Gate AlGaN/GaN HEMTs With Improved Trap-Related Characteristics

Abstract

In this brief, the trap-related characteristics of high-breakdown AlGaN/GaN high-electron-mobility transistors (HEMTs) were investigated. Compared with a conventional multifinger layout, the square-gate design presented reduced the current collapse from 19% to 6% and almost eliminated the gate lag. The flicker noise density and the gate leakage decreased from 1.16 times10 <sup xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">-10</sup> to 1.17 times10 <sup xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">-11</sup> 1/Hz ( <i xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">f</i> = 100 Hz) and from 7.36 times10 <sup xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">-5</sup> to 1.80 times10 <sup xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">-6</sup> A/mm ( <i xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">V</i> <sub xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">GS</sub> = -4 V and <i xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">V</i> <sub xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">DS</sub> = 100 V), respectively. The breakdown voltage was also improved from 350 to 650 V. With the channel area away from the defects generated by the mesa etching process, the square-gate AlGaN/GaN HEMTs demonstrated excellent performance with much less trapping effects.