High performance 0.1 /spl mu/m dynamic threshold MOSFET using indium channel implantation

Sun-Jay Chang, Chun-Yen Chang, Tien‐Sheng Chao, Tiao−Yuan Huang

IEEE Electron Device Letters · 2000 · 14 citations · 6 references

Concepts

Abstract

We demonstrate a high-performance 0.1 μm dynamic threshold voltage MOSFET (DTMOS) for ultra-low-voltage (i.e., <0.7 V) operations. Devices are realized by using super-steep-retrograde indium-channel profile. The steep indium-implanted-channel DTMOS can achieve a large body-effect-factor and a low V/sub th/ simultaneously, which results in an excellent performance for the indium-implanted DTMOS.

References

6