M. Nakano

Recrystallization of Si on amorphous substrates by doughnut-shaped cw Ar laser beam

S. Kawamura, J. Sakurai, M. Nakano et al. · Applied Physics Letters · 1982 · 112 citations

Engineering, Materials Engineering, Materials Science +17

Three-dimensional CMOS IC's Fabricated by using beam recrystallization

S. Kawamura, N. Sasaki, T. Iwai et al. · IEEE Electron Device Letters · 1983 · 74 citations

Engineering, Computer Engineering, Electrical Engineering +17

High-aspect-ratio via-hole filling with aluminum melting by excimer laser irradiation for multilevel interconnection

R. Mukai, Nobuo Sasaki, M. Nakano · IEEE Electron Device Letters · 1987 · 47 citations

Engineering, Materials Engineering, Materials Science +17

A 1Mb DRAM with 3-dimensional stacked capacitor cells

Yoshihir Takemae, T. Ema, M. Nakano et al. · 1985 · 28 citations

Engineering, Electrical Engineering, Materials Science +12

Novel bulk dynamic threshold voltage MOSFET (B-DTMOS) with advanced isolation (SITOS) and gate to shallow-well contact (SSS-C) processes for ultra low power dual gate CMOS

Hiroshi Kotaki, S. Kakimoto, M. Nakano et al. · 2002 · 28 citations

Engineering, Electrical Engineering, Low-power Design +14