Concepedia

R. Mukai

RM

Statistics

Publications

8

Citations

251

H-Index

8

Active since

1983

Affiliations

Fujitsu (Japan)(Current)

R. Mukai is an author at Fujitsu (Japan) specializing in applied physics, engineering, and materials science.

Top concepts

EngineeringApplied PhysicsMaterial ScienceMicroelectronicsPhysicsInstrumentationOptoelectronicsSurface ScienceMicrofabricationIntegrated Circuits

Publications per year

1983–2005

8

Publications

8

Compatibility of NiSi in the self-aligned suicide process for deep submicrometer devices

R. Mukai, Soichiro Ozawa, Hideshi Yagi · Thin Solid Films · 1995 · 63 citations

Engineering, Physics, Applied Physics +4

High-aspect-ratio via-hole filling with aluminum melting by excimer laser irradiation for multilevel interconnection

R. Mukai, Nobuo Sasaki, M. Nakano · IEEE Electron Device Letters · 1987 · 47 citations

Engineering, Multilevel Interconnection, Integrated Circuits +19

Microstructure improvement of thin Ru underlayer for CoCrPt-SiO/sub 2/ granular perpendicular media

R. Mukai, Takuya Uzumaki, Atsushi Tanaka · IEEE Transactions on Magnetics · 2005 · 44 citations

Materials Science, Material Analysis, Engineering +15

Signal-to-media-noise ratio improvement of CoCrPt-SiO2 granular perpendicular media by stacked Ru underlayer

R. Mukai, Takuya Uzumaki, Atsushi Tanaka · Journal of Applied Physics · 2005 · 34 citations

Materials Engineering, Materials Science, Signal-to-media-noise Ratio Improvement +9

Single crystalline Si islands on an amorphous insulating layer recrystallized by an indirect laser heating technique for three-dimensional integrated circuits

R. Mukai, Nobuo Sasaki, T. Iwai et al. · Applied Physics Letters · 1984 · 21 citations

Engineering, Optoelectronic Devices, Integrated Circuits +19

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