Concepedia

Soichiro Ozawa

SO

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Publications

3

Citations

84

H-Index

3

Active since

1995

Affiliations

Fujitsu (Japan)(Current)

Soichiro Ozawa is an author at Fujitsu (Japan) specializing in applied physics, instrumentation, and microelectronics.

Top concepts

Publications per year

1995–2018

3

Publications

3

Compatibility of NiSi in the self-aligned suicide process for deep submicrometer devices

R. Mukai, Soichiro Ozawa, Hideshi Yagi · Thin Solid Films · 1995 · 63 citations

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Improvement of ferroelectric random access memory manufacturing margin by employing Pt/AlO<i><sub>x</sub></i>bottom electrode for the La-doped Pb(Zr,Ti)O<sub>3</sub>ferroelectric capacitor

Kenji Nomura, Wensheng Wang, Hideshi Yamaguchi et al. · Japanese Journal of Applied Physics · 2018 · 11 citations

Control of La-doped Pb(Zr,Ti)O<sub>3</sub>crystalline orientation and its influence on the properties of ferroelectric random access memory

Wensheng Wang, Kenji Nomura, Hideshi Yamaguchi et al. · Japanese Journal of Applied Physics · 2017 · 10 citations

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