Impurity-profile-based threshold-voltage model of pocket-implanted MOSFETs for circuit simulation

Hideki Ueno, D. Kitamaru, Katsumi Morikawa, M. Tanaka, M. Miura–Mattausch, Hans Jürgen Mattausch, S. Kumashiro, Tomohiro Yamaguchi, K. Yamashita, N. Nakayama

IEEE Transactions on Electron Devices · 2002 · 22 citations · 11 references

Concepts

Abstract

A new threshold voltage (V/sub th/) model has been developed for the pocket-implant technology. The model extracts the threshold condition from the entire mobile charge concentration in the channel with only five additional parameters; the maximum doping concentration (N/sub subp/) of the pocket profile, the penetration length (L/sub p/) into the channel, and three enhanced short-channel parameters. The model reproduces the measured V/sub th/ versus. gate-length (L/sub gate/) characteristics with an average error of a few millivolts under any bias conditions.

References

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