Micromechanics compatible with an 0.8 μm CMOS process - Concepedia

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Micromechanics compatible with an 0.8 μm CMOS process

29

Citations

8

References

1995

Year

M. Biebl, T. Scheiter, Christofer Hierold, H. von Philipsborn, H. Klose

Sensors and Actuators A Physical

μM Cmos ProcessEngineeringMicrofabricationMechanical EngineeringMicroelectromechanical SystemsMicroelectronicsMicro TechnologyMicro-electromechanical System

References

	Year	Citations

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