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Publication | Open Access

Stiction of surface micromachined structures after rinsing and drying: model and investigation of adhesion mechanisms

DOIFull Paper Access

202

Citations

20

References

1994

Year

R. Legtenberg, H.A.C. Tilmans, J. Elders, M. Elwenspoek
Sensors and Actuators A Physical

References

YearCitations

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