Concepedia

Stiction

Stiction is a failure mechanism in micro-electromechanical systems (MEMS) characterized by the unintended and persistent adhesion of surfaces in static contact, primarily due to intermolecular forces, which prevents intended motion upon actuation.

265

Publications

11.1K

Citations

716

Authors

244

Institutions

Publications per year

2017–2026

26

Parents

Publications

265

Stiction in surface micromachining

Niels R. Tas, T. Sonnenberg, Henri Jansen et al. · Journal of Micromechanics and Microengineering · 1996 · 544 citations · Full text

, , +16

Adhesion and stiction: Mechanisms, measurement techniques, and methods for reduction

Bharat Bhushan · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2003 · 484 citations

, , +16

Alkyltrichlorosilane-based self-assembled monolayer films for stiction reduction in silicon micromachines

U. Srinivasan, M.R. Houston, Roger T. Howe et al. · Journal of Microelectromechanical Systems · 1998 · 425 citations

, , +17

Dynamics of mechanical systems with Coulomb friction, stiction, impact and constraint addition-deletion—I theory

Edward J. Haug, Shih C Wu, Shih Ming Yang · Mechanism and Machine Theory · 1986 · 204 citations

, , +16

Stiction of surface micromachined structures after rinsing and drying: model and investigation of adhesion mechanisms

R. Legtenberg, H.A.C. Tilmans, J. Elders · Sensors and Actuators A Physical · 1994 · 202 citations · Full text

, , +12

1–5 of 265

Authors

716

  1. BB
    Bharat Bhushan

    The Ohio State University, United States

    10 publications · 760 citations

    10

    h-index

  2. CS
    Claudio Scali

    University of Pisa, Italy

    7 publications · 300 citations

    7

    h-index

  3. RM
    Roya Maboudian

    University of California, Berkeley, United States

    6 publications · 696 citations

    6

    h-index

  4. WM
    W. Merlijn van Spengen

    IMEC, Belgium

    6 publications · 595 citations

    6

    h-index

  5. RR
    Raghunathan Rengaswamy

    Indian Institute of Technology Madras, India

    6 publications · 378 citations

    6

    h-index

1–5 of 716

Institutions

244

  1. University of California, Berkeley

    Berkeley, United States

    12 h-index

    35 publications

    3K citations

  2. The Ohio State University

    Columbus, United States

    10 h-index

    22 publications

    1.2K citations

  3. Centre National de la Recherche Scientifique

    Paris, France

    8 h-index

    25 publications

    782 citations

  4. Seagate (United States)

    Cupertino, United States

    8 h-index

    35 publications

    1K citations

  5. University of Pisa

    Pisa, Italy

    8 h-index

    19 publications

    708 citations

  6. University of Alberta

    Edmonton, Canada

    7 h-index

    15 publications

    523 citations

  7. KU Leuven

    Leuven, Belgium

    6 h-index

    12 publications

    1.3K citations

  8. IMEC

    Leuven, Belgium

    6 h-index

    14 publications

    1.6K citations

1–8 of 244

Venues

  1. Journal of Microelectromechanical Systems

    20 publications · 1.1K citations

    16

    h-index

  2. IEEE Transactions on Magnetics

    17 publications · 388 citations

    13

    h-index

  3. Journal of Micromechanics and Microengineering

    JMM · 15 publications · 1.4K citations

    13

    h-index

  4. Industrial & Engineering Chemistry Research

    11 publications · 507 citations

    11

    h-index

  5. Journal of Process Control

    10 publications · 606 citations

    10

    h-index

1–5