Concepedia
Statistics
Publications
31
Citations
1.7K
H-Index
19
Active since
1999
Affiliations
IMEC(Current)
Leiden University
KU Leuven
Delft University of Technology
Centre National de la Recherche Scientifique
W. Merlijn van Spengen is an author at IMEC specializing in engineering, applied physics, and microfabrication.
Top concepts
EngineeringMicrofabricationApplied PhysicsMicroelectronicsMechanical EngineeringMechanicsMaterial ScienceInstrumentationElectrical EngineeringMicroelectromechanical Systems
Publications per year
1999–2021
MEMS reliability from a failure mechanisms perspective
W. Merlijn van Spengen · Microelectronics Reliability · 2003 · 289 citations
Reliability, Reliability Engineering, Engineering +7
A comprehensive model to predict the charging and reliability of capacitive RF MEMS switches
W. Merlijn van Spengen, Robert Puers, R. Mertens et al. · Journal of Micromechanics and Microengineering · 2004 · 245 citations
Engineering, Radio Frequency, Power Electronics +16
A physical model to predict stiction in MEMS
W. Merlijn van Spengen, Robert Puers, Ingrid De Wolf · Journal of Micromechanics and Microengineering · 2002 · 196 citations
Engineering, Mechanical Engineering, Wetting +20
W. Merlijn van Spengen, R Pures, Ingrid De Wolf · Journal of Micromechanics and Microengineering · 2005 · 166 citations
Engineering, Severe Plastic Deformation, Mechanical Engineering +24
On the physics of stiction and its impact on the reliability of microstructures
W. Merlijn van Spengen, Robert Puers, Ingrid De Wolf · Journal of Adhesion Science and Technology · 2003 · 108 citations
Engineering, Severe Plastic Deformation, Micromechanics +18
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