MEMS reliability from a failure mechanisms perspective

DIGEST of TECHNICAL PAPERS

Richard S. Engelbrecht, Hsiung Hsu, Parametric Amplifiers et al. · 1959 · 1.4K citations

Document Analysis, Technical Papers, Science And Technology Studies +1

RF MEMS switches and switch circuits

Gabriel M. Rebeiz, Jeremy Muldavin · IEEE Microwave Magazine · 2001 · 949 citations

Electrical Engineering, Engineering, Mems Switches +13

Critical Review: Adhesion in surface micromechanical structures

Roya Maboudian, Roger T. Howe · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1997 · 826 citations

Materials Science, Strong Adhesion, Engineering +14

Stiction in surface micromachining

Niels R. Tas, T. Sonnenberg, Henri Jansen et al. · Journal of Micromechanics and Microengineering · 1996 · 542 citations

Engineering, Mechanical Engineering, Large Adhesion Forces +16

Mechanical stability and adhesion of microstructures under capillary forces. I. Basic theory

Carlos H. Mastrangelo, C.H. Hsu · Journal of Microelectromechanical Systems · 1993 · 484 citations

Engineering, Fluid Mechanics, Mechanical Engineering +20