Mems Reliability Testing

MEMS Reliability Testing is a systematic evaluation process that belongs to the category of MEMS testing methodologies and specifically characterizes the performance degradation and failure mechanisms of micro-electromechanical systems under prolonged or extreme operational conditions to ensure long-term functionality and robustness.

194

Publications

6.8K

Citations

614

Authors

191

Institutions

Publications per year

2017–2026

Parents

Mems Testing

Publications

194

SiC MEMS: opportunities and challenges for applications in harsh environments

Mehran Mehregany, Christian A. Zorman · Thin Solid Films · 1999 · 320 citations

Engineering, Materials Engineering, Materials Science +14

MEMS reliability from a failure mechanisms perspective

W. Merlijn van Spengen · Microelectronics Reliability · 2003 · 295 citations

Engineering, Mechanical Engineering, Systems Engineering +12

Long-Term and Accelerated Life Testing of a Novel Single-Wafer Vacuum Encapsulation for MEMS Resonators

Rob N. Candler, Matthew A. Hopcroft, Bongsang Kim et al. · Journal of Microelectromechanical Systems · 2006 · 205 citations

Engineering, Materials Engineering, Materials Science +17

MEMS Reliability Review

Yunhan Huang, Arvind Sai Sarathi Vasan, R. Doraiswami et al. · IEEE Transactions on Device and Materials Reliability · 2012 · 193 citations

Engineering, Materials Science, Mechanical Engineering +16

MEMS reliability in shock environments

Jeremy A. Walraven, KAREN SUE HELGESEN, Lloyd W. Irwin et al. · 2002 · 175 citations

Engineering, Electrical Engineering, Mechanical Engineering +17

1–5 of 194

Authors

614

JA
Jeremy A. Walraven
Sandia National Laboratories California, United States
8 publications · 424 citations
8
h-index
ID
Ingrid De Wolf
IMEC, Belgium
6 publications · 206 citations
6
h-index
RP
R. Plana
Laboratoire d'Analyse et d'Architecture des Systèmes, France
6 publications · 118 citations
6
h-index
NF
Norman F. Smith
Sandia National Laboratories California, United States
5 publications · 340 citations
5
h-index
PP
P. Pons
Centre National de la Recherche Scientifique, France
4 publications · 92 citations
4
h-index

1–5 of 614

Institutions

191

1–8 of 191

Venues

Microelectronics Reliability
26 publications · 1K citations
17
h-index
Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE
20 publications · 586 citations
15
h-index
MRS Proceedings
9 publications · 154 citations
9
h-index
Journal of Microelectromechanical Systems
8 publications · 593 citations
8
h-index
Microsystem Technologies
8 publications · 230 citations
8
h-index

1–5