Mems Testing

MEMS Testing is a systematic evaluation process within microelectromechanical systems engineering that verifies the functional performance, reliability, and environmental robustness of MEMS devices under controlled laboratory conditions.

2.1K

Publications

75.3K

Citations

6.7K

Authors

1.3K

Institutions

Publications per year

2017–2026

385

Parents

Microelectromechanical Systems

Children

Accelerated Life TestingDynamic Testing Of Mems DevicesElectrical Testing Of Mems DevicesEnvironmental Testing Of Mems DevicesFatigue Testing Of Mems DevicesIn-process TestingMechanical Testing Of Mems DevicesMems Actuator TestingMems CalibrationMems Failure Analysis

Publications

2.1K

M-TEST: A test chip for MEMS material property measurement using electrostatically actuated test structures

P.M. Osterberg, S.D. Senturia · Journal of Microelectromechanical Systems · 1997 · 764 citations

Engineering, Electrical Engineering, Materials Science +17

Micro Experimental Laboratory: An integrated system for IBM PC compatibles

Walter Schneider · Behavior Research Methods, Instruments, & Computers · 1988 · 728 citations · Full text

Engineering, Computer Engineering, Computer Systems +10

High-aspect-ratio, ultrathick, negative-tone near-UV photoresist and its applications for MEMS

H. Lorenz, M. Despont, N. Fahrni et al. · Sensors and Actuators A Physical · 1998 · 573 citations · Full text

Engineering, Materials Engineering, Materials Science +12

Implementation and testing of passive control devices based on shape memory alloys

Mauro Dolce, Donatello Cardone, Roberto Marnetto · Earthquake Engineering & Structural Dynamics · 2000 · 510 citations

Engineering, Materials Engineering, Materials Science +13

Fabrication and performance of MEMS-based piezoelectric power generator for vibration energy harvesting

Hua-Bin Fang, Jingquan Liu, Zhengyi Xu et al. · Microelectronics Journal · 2006 · 482 citations

Engineering, Electrical Engineering, Mechanical Engineering +17

1–5 of 2.1K

Authors

6.7K

AM
Andrei M. Shkel
University of California, Irvine, United States
22 publications · 687 citations
16
h-index
TW
Thomas W. Kenny
Stanford University, United States
17 publications · 913 citations
15
h-index
KN
K. Najafi
University of Michigan, United States
16 publications · 896 citations
14
h-index
GL
Giacomo Langfelder
Politecnico di Milano, Italy
14 publications · 426 citations
14
h-index
AA
Alexander A. Trusov
University of California, Irvine, United States
13 publications · 426 citations
12
h-index

1–5 of 6.7K

Institutions

1.3K

1–8 of 1.3K

Venues

Sensors and Actuators A Physical
167 publications · 7.7K citations
50
h-index
Journal of Microelectromechanical Systems
132 publications · 7.7K citations
46
h-index
Journal of Micromechanics and Microengineering
JMM · 127 publications · 4.9K citations
40
h-index
Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE
95 publications · 2.4K citations
26
h-index
IEEE Sensors Journal
45 publications · 1.3K citations
22
h-index

1–5