Concepedia

Mems Actuator Testing

MEMS Actuator Testing is a systematic evaluation methodology that characterizes the electromechanical response, precision, reliability, and dynamic performance of micro-scale actuating components within microelectromechanical systems to ensure functional conformity and operational integrity under specified conditions.

56

Publications

1.8K

Citations

226

Authors

86

Institutions

Publications per year

2017–2026

6

Parents

Publications

56

Design and Operation of a MEMS-Based Material Testing System for Nanomechanical Characterization

Horacio D. Espinosa, Yong Zhu, N. Moldovan · Journal of Microelectromechanical Systems · 2007 · 188 citations

, , +17

Microscale materials testing using MEMS actuators

Aman Haque, M. Taher A. Saif · Journal of Microelectromechanical Systems · 2001 · 116 citations

, , +17

Linear and Nonlinear Tuning of Parametrically Excited MEMS Oscillators

Barry E. DeMartini, Jeffrey F. Rhoads, Kimberly L. Turner et al. · Journal of Microelectromechanical Systems · 2007 · 109 citations

, , +16

MEMS for <i>In Situ</i> Testing—Handling, Actuation, Loading, and Displacement Measurements

Aman Haque, Horacio D. Espinosa, H.J. Lee · MRS Bulletin · 2010 · 86 citations

, , +12

Failure mechanisms of a MEMS actuator in very high vacuum

Steven T. Patton, J.S. Zabinski · Tribology International · 2002 · 71 citations

, , +16

1–5 of 56

Authors

226

  1. CH
    Chih‐Ming Ho

    University of California, Los Angeles, United States

    3 publications · 99 citations

    3

    h-index

  2. HD
    Horacio D. Espinosa

    Northwestern University, United States

    3 publications · 285 citations

    3

    h-index

  3. YZ
    Yong Zhu

    North Carolina State University, United States

    2 publications · 199 citations

    2

    h-index

  4. AH
    Aman Haque

    Pennsylvania State University, United States

    2 publications · 202 citations

    2

    h-index

  5. JW
    Julia W. Evans

    Lawrence Livermore National Laboratory, United States

    2 publications · 50 citations

    2

    h-index

1–5 of 226

Institutions

86

  1. University of California, Santa Cruz

    Santa Cruz, United States

    3 h-index

    13 publications

    313 citations

  2. University of Michigan

    Ann Arbor, United States

    3 h-index

    8 publications

    215 citations

  3. California Institute of Technology

    Pasadena, United States

    3 h-index

    7 publications

    217 citations

  4. University of California, Los Angeles

    Los Angeles, United States

    2 h-index

    5 publications

    174 citations

  5. University of California, Davis

    Davis, United States

    2 h-index

    2 publications

    50 citations

  6. Sandia National Laboratories California

    Livermore, United States

    2 h-index

    9 publications

    149 citations

  7. Sandia National Laboratories

    Albuquerque, United States

    2 h-index

    9 publications

    233 citations

  8. Boston Micromachines (United States)

    Cambridge, United States

    2 h-index

    2 publications

    61 citations

1–8 of 86

Venues

  1. Journal of Microelectromechanical Systems

    9 publications · 583 citations

    9

    h-index

  2. Sensors and Actuators A Physical

    5 publications · 114 citations

    5

    h-index

  3. 5

    h-index

  4. Micromachines

    2 publications · 82 citations

    2

    h-index

  5. Microsystem Technologies

    2 publications · 28 citations

    2

    h-index

1–5