Steven T. Patton

Fundamental studies of Au contacts in MEMS RF switches

Steven T. Patton, J.S. Zabinski · Tribology Letters · 2005 · 198 citations

Engineering, Electrical Engineering, Materials Science +16

Effect of surface chemistry on the tribological performance of a MEMS electrostatic lateral output motor

Steven T. Patton, William D. Cowan, Kalathil C. Eapen et al. · Tribology Letters · 2001 · 106 citations

Engineering, Materials Science, Mechanical Engineering +16

Lubrication of Microelectromechanical Systems (MEMS) Using Bound and Mobile Phases of Fomblin Zdol®

Kalathil C. Eapen, Steven T. Patton, J.S. Zabinski · Tribology Letters · 2002 · 98 citations

Engineering, Materials Science, Mechanical Engineering +16

Performance results of MEMS coated with a conformal DLC

Steven A. Smallwood, Kalathil C. Eapen, Steven T. Patton et al. · Wear · 2005 · 97 citations

Engineering, Materials Engineering, Materials Science +9

Failure mechanisms of a MEMS actuator in very high vacuum

Steven T. Patton, J.S. Zabinski · Tribology International · 2002 · 71 citations

Engineering, Materials Science, Mechanical Engineering +16