Concepedia

Steven T. Patton

ST

32

Publications

1.3K

Citations

21

H-Index

1995

Active since

Affiliations

University of Dayton(Current)

Wright-Patterson Air Force Base

The Ohio State University

United States Air Force Research Laboratory

Universal Technical Institute

Steven T. Patton is an author at University of Dayton specializing in engineering, materials science, and mechanical engineering.

Top concepts

EngineeringMaterial ScienceMechanical EngineeringMicrofabricationApplied PhysicsSurface ScienceMicroelectronicsElectrical EngineeringMagnetismNanomaterials

Publications per year

1995–2019

32

Publications

32

Fundamental studies of Au contacts in MEMS RF switches

Steven T. Patton, J.S. Zabinski · Tribology Letters · 2005 · 197 citations

Electrical Engineering, Engineering, Applied Physics +4

Effect of surface chemistry on the tribological performance of a MEMS electrostatic lateral output motor

Steven T. Patton, William D. Cowan, Kalathil C. Eapen et al. · Tribology Letters · 2001 · 106 citations

Lubrication of Microelectromechanical Systems (MEMS) Using Bound and Mobile Phases of Fomblin Zdol®

Kalathil C. Eapen, Steven T. Patton, J.S. Zabinski · Tribology Letters · 2002 · 98 citations

Performance results of MEMS coated with a conformal DLC

Steven A. Smallwood, Kalathil C. Eapen, Steven T. Patton et al. · Wear · 2005 · 96 citations

Materials Science, Performance Results, Engineering +6

Failure mechanisms of a MEMS actuator in very high vacuum

Steven T. Patton, J.S. Zabinski · Tribology International · 2002 · 71 citations

Engineering, Micromachines, Microfabrication +11

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