Lubrication of Microelectromechanical Systems (MEMS) Using Bound and Mobile Phases of Fomblin Zdol®

Critical Review: Adhesion in surface micromechanical structures

Roya Maboudian, Roger T. Howe · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1997 · 830 citations

Engineering, Materials Engineering, Materials Science +17

Alkyltrichlorosilane-based self-assembled monolayer films for stiction reduction in silicon micromachines

U. Srinivasan, M.R. Houston, Roger T. Howe et al. · Journal of Microelectromechanical Systems · 1998 · 425 citations

Engineering, Materials Engineering, Materials Science +17

Perfluoropolyethers: Their physical properties and behaviour at high and low temperatures

D. SIANESI, V. Zamboni, Renzo Fontanelli et al. · Wear · 1971 · 175 citations

Natural Sciences, Chemistry, Materials Science +5

Lubrication of digital micromirrordevicesTM

Steven A. Henck · Tribology Letters · 1997 · 140 citations

Mechanistic Aspects of Alkylchlorosilane Coupling Reactions

R. R. Rye, Gerald C. Nelson, Michael T. Dugger · Langmuir · 1997 · 128 citations

Natural Sciences, Chemistry, Materials Science +17