Mems Failure Analysis

MEMS Failure Analysis is a systematic investigative methodology within the field of microelectromechanical systems engineering that identifies, characterizes, and determines the root causes of performance degradation, malfunction, or breakdown in MEMS devices through physical, electrical, and environmental examination.

106

Publications

4.8K

Citations

298

Authors

118

Institutions

Publications per year

2017–2026

Parents

Mems Testing

Publications

106

Materials issues in microelectromechanical systems (MEMS)

S.M. Spearing · Acta Materialia · 2000 · 652 citations

Engineering, Materials Engineering, Materials Science +14

MEMS reliability from a failure mechanisms perspective

W. Merlijn van Spengen · Microelectronics Reliability · 2003 · 295 citations

Engineering, Mechanical Engineering, Systems Engineering +12

Reliability-based design of MEMS mechanisms by topology optimization

Kurt Maute, Dan M. Frangopol · Computers & Structures · 2003 · 263 citations

Engineering, Mechanical Engineering, Systems Engineering +12

MEMS Reliability Review

Yunhan Huang, Arvind Sai Sarathi Vasan, R. Doraiswami et al. · IEEE Transactions on Device and Materials Reliability · 2012 · 193 citations

Engineering, Materials Science, Mechanical Engineering +16

Fracture toughness of polysilicon MEMS devices

H. Kahn, Noureddine Tayebi, R. Ballarini et al. · Sensors and Actuators A Physical · 2000 · 163 citations

Engineering, Materials Engineering, Materials Science +14

1–5 of 106

Authors

298

AG
Aldo Ghisi
Politecnico di Milano, Italy
5 publications · 233 citations
5
h-index
AC
Alberto Corigliano
Politecnico di Milano, Italy
5 publications · 233 citations
5
h-index
ID
Ingrid De Wolf
IMEC, Belgium
5 publications · 111 citations
5
h-index
JA
Jeremy A. Walraven
Sandia National Laboratories California, United States
5 publications · 214 citations
5
h-index
IC
Ioannis Chasiotis
University of Illinois Urbana-Champaign, United States
4 publications · 109 citations
4
h-index

1–5 of 298

Institutions

118

1–8 of 118

Venues

Microelectronics Reliability
19 publications · 824 citations
16
h-index
Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE
9 publications · 244 citations
9
h-index
Sensors and Actuators A Physical
5 publications · 251 citations
5
h-index
Journal of Microelectromechanical Systems
4 publications · 140 citations
4
h-index
Thin Solid Films
2 publications · 60 citations
2
h-index

1–5