Fracture toughness of polysilicon MEMS devices - Concepedia

Concepedia

Publication | Closed Access

Fracture toughness of polysilicon MEMS devices

163

Citations

9

References

2000

Year

H. Kahn, Noureddine Tayebi, R. Ballarini, Robert L. Mullen, A. H. Heuer

Sensors and Actuators A Physical

Materials ScienceEngineeringMechanical BehaviorMicrofabricationFracture ToughnessMechanical EngineeringMicrostructure-strength RelationshipMicro-electromechanical SystemMechanics Of MaterialsMicrostructure

References

	Year	Citations

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