A new approach for the fabrication of micromechanical structures

Silicon as a mechanical material

K. Petersen · Proceedings of the IEEE · 1982 · 2.9K citations

Engineering, Materials Engineering, Materials Science +13

Silicon Micromechanical Devices

James B. Angell, S.C. Terry, P.W. Barth · Scientific American · 1983 · 220 citations

Polycrystalline Silicon Micromechanical Beams

Roger T. Howe, R.S. Muller · Journal of The Electrochemical Society · 1983 · 192 citations

Engineering, Materials Science, Mechanical Engineering +17

Fabrication of high-performance LDDFET's with Oxide sidewall-spacer technology

P.J. Tsang, S. Ogura, William W. Walker et al. · IEEE Transactions on Electron Devices · 1982 · 115 citations

Engineering, Electrical Engineering, Materials Science +10

A retrograde p-well for higher density CMOS

R.D. Rung, C. J. Dell'Oca, L. Walker · IEEE Transactions on Electron Devices · 1981 · 86 citations

Engineering, Computer Engineering, Electrical Engineering +12