A new approach for the fabrication of micromechanical structures - Concepedia

Concepedia

Publication | Closed Access

A new approach for the fabrication of micromechanical structures

128

Citations

14

References

1989

Year

M. Parameswaran, H. Baltes, Lj. Ristic, A.C. Dhaded, A.M. Robinson

Sensors and Actuators

Materials ScienceEngineeringSoft RoboticsMicromechanicsMicrofabricationMicromachinesMechanical EngineeringMicromechanical StructuresMicroactuator3D Printing

References

	Year	Citations

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