P.W. Barth

Silicon Micromechanical Devices

James B. Angell, S.C. Terry, P.W. Barth · Scientific American · 1983 · 219 citations

Engineering, Micromachines, Microfabrication +7

An In-Depth Look at Pressure Sores Using Monolithic Silicon Pressure Sensors

Khanh M. Le, Berit Madsen, P.W. Barth et al. · Plastic & Reconstructive Surgery · 1984 · 123 citations

Silicon Microvalves For Gas Flow Control

P.W. Barth · Proceedings of the International Solid-State Sensors and Actuators Conference - TRANSDUCERS '95 · 2005 · 72 citations

Valve Technologies, Flow Control, Engineering +12

Low-pressure sensors employing bossed diaphragms and precision etch-stopping

Joseph R. Mallon, F. Pourahmadi, K. Petersen et al. · Sensors and Actuators A Physical · 1990 · 52 citations

Engineering, Low-pressure Sensors, Sensors +8

Ultra-stable, high-temperature pressure sensors using silicon fusion bonding

K. Petersen, Joe Brown, Ted Vermeulen et al. · Sensors and Actuators A Physical · 1990 · 52 citations

Materials Science, Engineering, Sensors +6