Joseph R. Mallon

Review: Semiconductor Piezoresistance for Microsystems

A.A. Barlian, Woo‐Tae Park, Joseph R. Mallon et al. · Proceedings of the IEEE · 2009 · 932 citations · Full text

Engineering, Materials Engineering, Materials Science +17

Silicon fusion bonding for pressure sensors

K. Petersen, Philip W. Barth, J. Poydock et al. · 2003 · 130 citations

Engineering, Materials Engineering, Materials Science +17

Low-pressure sensors employing bossed diaphragms and precision etch-stopping

Joseph R. Mallon, F. Pourahmadi, K. Petersen et al. · Sensors and Actuators A Physical · 1990 · 54 citations

Engineering, Mechanical Engineering, Instrumentation +8

Ultra-stable, high-temperature pressure sensors using silicon fusion bonding

K. Petersen, Joe Brown, Ted Vermeulen et al. · Sensors and Actuators A Physical · 1990 · 52 citations

Engineering, Materials Engineering, Materials Science +14

Single-crysytal silicon pressure sensors with 500 × overpressure protection

L. A. Christel, K. Petersen, P.W. Barth et al. · Sensors and Actuators A Physical · 1990 · 38 citations

Engineering, Materials Engineering, Materials Science +13