Single-crysytal silicon pressure sensors with 500 × overpressure protection

Silicon as a mechanical material

K. Petersen · Proceedings of the IEEE · 1982 · 2.9K citations

Engineering, Materials Engineering, Materials Science +13

Silicon fusion bonding for pressure sensors

K. Petersen, Philip W. Barth, J. Poydock et al. · 2003 · 130 citations

Engineering, Materials Engineering, Materials Science +17

Low-pressure sensors employing bossed diaphragms and precision etch-stopping

Joseph R. Mallon, F. Pourahmadi, K. Petersen et al. · Sensors and Actuators A Physical · 1990 · 54 citations

Engineering, Mechanical Engineering, Instrumentation +8

Silicon microcavities fabricated with a new technique

L Tenerz, Bertil Hök · Electronics Letters · 1986 · 21 citations

Engineering, Electrical Engineering, Materials Engineering +17

Disposable blood pressure sensors with digital on-chop laser trimming

Janusz Bryzek, Richard C. Mayer, P.W. Barth · 2003 · 11 citations

Engineering, Biomedical Engineering, Electrical Engineering +16