L Tenerz is an author at Uppsala University specializing in engineering, microfabrication, and mechanical engineering.
Top concepts
EngineeringMicrofabricationMechanical EngineeringApplied PhysicsInstrumentationMaterial ScienceMicrofluidicsSensor DesignMicroelectronicsBiomedical Sensors
Publications per year
1986–2002
11
11
Etching roughness for (100) silicon surfaces in aqueous KOH
E. D. Palik, O. J. Glembocki, I. Heard et al. · Journal of Applied Physics · 1991 · 158 citations
Rows per page
1–5 of 11