A batch-fabricated non-reverse valve with cantilever beam manufactured by micromachining of silicon

Silicon as a mechanical material

K. Petersen · Proceedings of the IEEE · 1982 · 2.9K citations

Engineering, Materials Engineering, Materials Science +13

A gas chromatographic air analyzer fabricated on a silicon wafer

S.C. Terry, J.H. Jerman, James B. Angell · IEEE Transactions on Electron Devices · 1979 · 1.4K citations

Natural Sciences, Chemical Engineering, Chemistry +17

Fracture testing of silicon microelements <i>i</i> <i>n</i> <i>s</i> <i>i</i> <i>t</i> <i>u</i> in a scanning electron microscope

Stefan Johansson, Jan‐Åke Schweitz, L Tenerz et al. · Journal of Applied Physics · 1988 · 225 citations

Engineering, Materials Engineering, Materials Science +17

Bias‐Dependent Etching of Silicon in Aqueous  KOH

O. J. Glembocki, Robert E. Stahlbush, Micha Tomkiewicz · Journal of The Electrochemical Society · 1985 · 138 citations

Natural Sciences, Chemistry, Materials Science +17

Fabrication of three-dimensional silicon structures by means of doping-selective etching (DSE)

Y. Lindén, L Tenerz, J Tirén et al. · Sensors and Actuators · 1989 · 43 citations

Engineering, Materials Engineering, Materials Science +14