Fabrication of three-dimensional silicon structures by means of doping-selective etching (DSE)

Silicon as a mechanical material

K. Petersen · Proceedings of the IEEE · 1982 · 2.9K citations

Miniaturization, Engineering, Micromechanics +19

Fracture testing of silicon microelements <i>i</i> <i>n</i> <i>s</i> <i>i</i> <i>t</i> <i>u</i> in a scanning electron microscope

Stefan Johansson, Jan‐Åke Schweitz, L Tenerz et al. · Journal of Applied Physics · 1988 · 225 citations

Engineering, Micromechanics, Microscopy +23

Bias‐Dependent Etching of Silicon in Aqueous  KOH

O. J. Glembocki, Robert E. Stahlbush, Micha Tomkiewicz · Journal of The Electrochemical Society · 1985 · 138 citations

Engineering, Semiconductor Materials, Integrated Circuits +17

Study of the Etch‐Stop Mechanism in Silicon

E. D. Palik, J. W. Faust, H.F. Gray et al. · Journal of The Electrochemical Society · 1982 · 105 citations · Full text

Semiconductors, High Density, Electrical Engineering +14

Electrochemically Controlled Thinning of Silicon

H.A. Waggener · Bell System Technical Journal · 1970 · 87 citations

Engineering, Integrated Circuits, Silicon On Insulator +18