J Tirén

Fracture testing of silicon microelements <i>i</i> <i>n</i> <i>s</i> <i>i</i> <i>t</i> <i>u</i> in a scanning electron microscope

Stefan Johansson, Jan‐Åke Schweitz, L Tenerz et al. · Journal of Applied Physics · 1988 · 225 citations

Engineering, Micromechanics, Microscopy +23

Deep level transient spectroscopy analysis of fast ion tracks in silicon

Anders Hallén, B. U. R. Sundqvist, Z. F. Paska et al. · Journal of Applied Physics · 1990 · 61 citations · Full text

Engineering, Nuclear Physics, Irradiation Dose +20

A batch-fabricated non-reverse valve with cantilever beam manufactured by micromachining of silicon

J Tirén, L Tenerz, Bertil Hök · Sensors and Actuators · 1989 · 60 citations

Engineering, Micromachines, Microfabrication +4

Fabrication of three-dimensional silicon structures by means of doping-selective etching (DSE)

Y. Lindén, L Tenerz, J Tirén et al. · Sensors and Actuators · 1989 · 43 citations

Materials Science, Wafer Scale Processing, Engineering +12

Complementary Si MESFET concept using silicon-on-sapphire technology

P.A. Tove, K Bohlin, Ferenc Masszi et al. · IEEE Electron Device Letters · 1988 · 19 citations

Semiconductor Technology, Electrical Engineering, Semiconductor Device +13