Concepedia

Silicon Micromachining

Silicon Micromachining is a micromachining process that uses silicon as the base material and employs bulk or surface etching techniques to fabricate micro-scale structures, distinguished by its compatibility with integrated circuit fabrication methods and its ability to produce highly precise, miniaturized mechanical and electromechanical components.

1.1K

Publications

50.7K

Citations

3.4K

Authors

703

Institutions

Publications per year

2017–2026

90

Parents

Publications

1.1K

The "millipede" - nanotechnology entering data storage

P. Vettiger, Graham L. W. Cross, M. Despont et al. · IEEE Transactions on Nanotechnology · 2002 · 742 citations

, , +14

Bulk micromachining of silicon

G.T.A. Kovacs, N.I. Maluf, K. Petersen · Proceedings of the IEEE · 1998 · 721 citations

, , +17

Chemically etched ultrahigh-Q wedge-resonator on a silicon chip

Hansuek Lee, Tong Chen, Jiang Li et al. · Nature Photonics · 2012 · 697 citations

, , +14

A piezoelectric micropump based on micromachining of silicon

H.T.G. van Lintel, F.C.M. van de Pol, S. Bouwstra · Sensors and Actuators · 1988 · 617 citations · Full text

, , +12

Electrochemical Micromachining

Rolf Schuster, Viola Kirchner, P. Allongue et al. · Science · 2000 · 582 citations

, , +17

1–5 of 1.1K

Authors

3.4K

  1. ME
    Masayoshi Esashi

    Tohoku University, Japan

    16 publications · 822 citations

    14

    h-index

  2. GB
    Giuseppe Barillaro

    University of Pisa, Italy

    15 publications · 533 citations

    12

    h-index

  3. PS
    P.M. Sarro

    Delft University of Technology, Netherlands

    12 publications · 511 citations

    11

    h-index

  4. KH
    Kazuhiro Hane

    Tohoku University, Japan

    11 publications · 330 citations

    11

    h-index

  5. BK
    B.T. Khuri-Yakub

    Stanford University, United States

    11 publications · 860 citations

    11

    h-index

1–5 of 3.4K

Institutions

703

  1. University of Michigan

    Ann Arbor, United States

    23 h-index

    98 publications

    5K citations

  2. University of California, Berkeley

    Berkeley, United States

    20 h-index

    68 publications

    3.9K citations

  3. Tohoku University

    Sendai, Japan

    19 h-index

    85 publications

    2.8K citations

  4. Massachusetts Institute of Technology

    Cambridge, United States

    19 h-index

    95 publications

    6.2K citations

  5. Stanford University

    Stanford, United States

    18 h-index

    86 publications

    4.3K citations

  6. Delft University of Technology

    Delft, The Netherlands

    17 h-index

    84 publications

    3.2K citations

  7. University of Twente

    Enschede, The Netherlands

    16 h-index

    64 publications

    6.1K citations

  8. Jet Propulsion Laboratory

    Pasadena, United States

    16 h-index

    105 publications

    4K citations

1–8 of 703

Venues

  1. Journal of Microelectromechanical Systems

    67 publications · 5K citations

    39

    h-index

  2. Journal of Micromechanics and Microengineering

    JMM · 108 publications · 4K citations

    38

    h-index

  3. Sensors and Actuators A Physical

    87 publications · 4.2K citations

    36

    h-index

  4. Applied Physics Letters

    30 publications · 1.9K citations

    24

    h-index

  5. 17

    h-index

1–5