The first surface micromachined pressure sensor for cardiovascular pressure measurements

Abstract

A surface micromachined pressure sensor for blood pressure measurements has been commercialized. Using a polysilicon surface micromachining process, a silicon chip with the dimensions of 100/spl times/150/spl times/1300 /spl mu/m and a polysilicon diaphragm area of 103/spl times/103 /spl mu/m has been fabricated. The piezoresistive pressure sensor has a typical pressure sensitivity of 2.0 /spl mu/V/V mmHg which results in a blood pressure measurement accuracy better than 2 mmHg. This new pressure sensor is used clinically for blood pressure measurements in balloon angioplasty applications.