Surface micromachined pressure transducers

Mechanical property measurements of thin films using load-deflection of composite rectangular membranes

Osamu Tabata, Ken Kawahata, Susumu Sugiyama et al. · Sensors and Actuators · 1989 · 399 citations

Materials Science, Membrane Structure, Membrane Formation +11

A simple technique for the determination of mechanical strain in thin films with applications to polysilicon

H. Guckel, T. Randazzo, D.W. Burns · Journal of Applied Physics · 1985 · 268 citations

Engineering, Micromechanics, Mechanical Engineering +19

Resonant-microbridge vapor sensor

Roger T. Howe, R.S. Muller · IEEE Transactions on Electron Devices · 1986 · 223 citations

Nmos Circuit, Engineering, Vapor Sensor +16

A batch-fabricated silicon capacitive pressure transducer with low temperature sensitivity

Y. S. Lee, K.D. Wise · IEEE Transactions on Electron Devices · 1982 · 215 citations

Electrical Engineering, Biomedical Sensors, Engineering +15

Polycrystalline Silicon Micromechanical Beams

Roger T. Howe, R.S. Muller · Journal of The Electrochemical Society · 1983 · 192 citations

Materials Science, Mechanical Beams, Engineering +13