Osamu Tabata

Anisotropic etching of silicon in TMAH solutions

Osamu Tabata, Ryouji Asahi, Hirofumi Funabashi et al. · Sensors and Actuators A Physical · 1992 · 454 citations

Materials Science, Materials Engineering, Engineering +7

Mechanical property measurements of thin films using load-deflection of composite rectangular membranes

Osamu Tabata, Ken Kawahata, Susumu Sugiyama et al. · Sensors and Actuators · 1989 · 399 citations

Materials Science, Membrane Structure, Membrane Formation +11

Specimen size effect on tensile strength of surface-micromachined polycrystalline silicon thin films

Toshiyuki Tsuchiya, Osamu Tabata, Jiro Sakata et al. · Journal of Microelectromechanical Systems · 1998 · 389 citations

Engineering, Mechanical Engineering, Hardness +18

Ciliary motion actuator using self-oscillating gel

Osamu Tabata, Hiroshi Hirasawa, Shintaro Aoki et al. · Sensors and Actuators A Physical · 2002 · 128 citations

Engineering, Biomechanics, Mechanical Engineering +5

Integrated heart/cancer on a chip to reproduce the side effects of anti-cancer drugs in vitro

Ken‐ichiro Kamei, Yoshiki Kato, Yoshikazu Hirai et al. · RSC Advances · 2017 · 117 citations · Full text

Engineering, Immunology, Organ-on-a-chip +17