Hirofumi Funabashi

Anisotropic etching of silicon in TMAH solutions

Osamu Tabata, Ryouji Asahi, Hirofumi Funabashi et al. · Sensors and Actuators A Physical · 1992 · 454 citations

Materials Science, Materials Engineering, Engineering +7

A z-axis differential capacitive SOI accelerometer with vertical comb electrodes

Toshiyuki Tsuchiya, Hirofumi Funabashi · Sensors and Actuators A Physical · 2004 · 60 citations

Electrical Engineering, Medical Electronics, Engineering +2

Polysilicon vibrating gyroscope vacuum-encapsulated in an on-chip micro chamber

Toshiyuki Tsuchiya, Yasuyuki Kageyama, Hirofumi Funabashi et al. · Sensors and Actuators A Physical · 2001 · 53 citations

On-chip Micro Chamber, Engineering, Microfabrication +5

ANISOTROPIC ETCHING OF SILICON IN (CH3)4NOH SOLUTIONS

Osamu Tabata, Ryouji Asahi, Hirofumi Funabashi et al. · 1991 · 29 citations

Materials Science, Materials Engineering, Chemical Engineering +14

Silicon anisotropic etching without attacking aluminum with Si and oxidizing agent dissolved in TMAH solution

Norio Fujitsuka, Kanae Hamaguchi, Hirofumi Funabashi et al. · Sensors and Actuators A Physical · 2003 · 28 citations

Materials Science, Materials Engineering, Engineering +10