Silicon anisotropic etching without attacking aluminum with Si and oxidizing agent dissolved in TMAH solution

Anisotropic etching of silicon in TMAH solutions

Osamu Tabata, Ryouji Asahi, Hirofumi Funabashi et al. · Sensors and Actuators A Physical · 1992 · 458 citations

Engineering, Materials Engineering, Materials Science +14

An improved TMAH Si-etching solution without attacking exposed aluminum

Guizhen Yan, Philip C.H. Chan, I‐Ming Hsing et al. · Sensors and Actuators A Physical · 2001 · 111 citations

Engineering, Materials Engineering, Materials Science +10

Effects of small amount of impurities on etching of silicon in aqueous potassium hydroxide solutions

Hiroshi Tanaka, Yoshitsugu Abe, Takao Yoneyama et al. · Sensors and Actuators A Physical · 2000 · 43 citations

Natural Sciences, Materials Engineering, Materials Science +10

Diode-based thermal r.m.s. converter with on-chip circuitry fabricated using CMOS technology

E.H. Klaassen, R.J. Reay, G.T.A. Kovacs · Sensors and Actuators A Physical · 1996 · 29 citations

Engineering, Electrical Engineering, Electronic Materials +16

The effects of thermal treatment on the anisotropic etching behavior of Cz- and Fz-silicon

Aylin Hein, S. Finkbeiner, J. Marek · Sensors and Actuators A Physical · 2000 · 13 citations

Engineering, Materials Engineering, Materials Science +12