Concepedia

Yoshitsugu Abe

YA

Statistics

Publications

3

Citations

137

H-Index

3

Active since

2000

Affiliations

Denso (Japan)(Current)

Yoshitsugu Abe is an author at Denso (Japan) specializing in applied physics, materials engineering, and engineering.

Top concepts

Publications per year

2000–2004

3

Publications

3

Fast etching of silicon with a smooth surface in high temperature ranges near the boiling point of KOH solution

Hiroshi Tanaka, Shu‐ichi Yamashita, Yoshitsugu Abe et al. · Sensors and Actuators A Physical · 2004 · 85 citations

, , +13

Effects of small amount of impurities on etching of silicon in aqueous potassium hydroxide solutions

Hiroshi Tanaka, Yoshitsugu Abe, Takao Yoneyama et al. · Sensors and Actuators A Physical · 2000 · 42 citations

, , +9

Effects of ppb-level metal impurities in aqueous potassium hydroxide solution on the etching of Si{110} and {100}

Hiroshi Tanaka, Yoshitsugu Abe, Kazuyuki Inoue et al. · Sensors and Materials · 2003 · 10 citations · Full text

, , +14

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